JPS6185055U - - Google Patents
Info
- Publication number
- JPS6185055U JPS6185055U JP17057984U JP17057984U JPS6185055U JP S6185055 U JPS6185055 U JP S6185055U JP 17057984 U JP17057984 U JP 17057984U JP 17057984 U JP17057984 U JP 17057984U JP S6185055 U JPS6185055 U JP S6185055U
- Authority
- JP
- Japan
- Prior art keywords
- lens
- center axis
- holders
- insulated
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17057984U JPS6185055U (en]) | 1984-11-09 | 1984-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17057984U JPS6185055U (en]) | 1984-11-09 | 1984-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6185055U true JPS6185055U (en]) | 1986-06-04 |
Family
ID=30728286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17057984U Pending JPS6185055U (en]) | 1984-11-09 | 1984-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185055U (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162700U (en]) * | 1988-04-30 | 1989-11-13 | ||
| JP2003028999A (ja) * | 2001-07-11 | 2003-01-29 | Ebara Corp | 荷電粒子ビーム制御装置、及びそれを用いた荷電粒子ビーム光学装置、荷電粒子ビーム欠陥検査装置、並びに荷電粒子ビーム制御方法 |
| JP6173552B1 (ja) * | 2016-05-27 | 2017-08-02 | エム・ベー・サイエンティフィック・アクチボラゲットＭｂ Ｓｃｉｅｎｔｉｆｉｃ Ａｂ | 電子分光器 |
-
1984
- 1984-11-09 JP JP17057984U patent/JPS6185055U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01162700U (en]) * | 1988-04-30 | 1989-11-13 | ||
| JP2003028999A (ja) * | 2001-07-11 | 2003-01-29 | Ebara Corp | 荷電粒子ビーム制御装置、及びそれを用いた荷電粒子ビーム光学装置、荷電粒子ビーム欠陥検査装置、並びに荷電粒子ビーム制御方法 |
| JP6173552B1 (ja) * | 2016-05-27 | 2017-08-02 | エム・ベー・サイエンティフィック・アクチボラゲットＭｂ Ｓｃｉｅｎｔｉｆｉｃ Ａｂ | 電子分光器 |